IUV-25CP Spectral Irradiation Unit for Photoresist

MOQ	1 Unit
Port	Tokyo
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Product Details

A spectroscopic device that emits monochromatic light with a wavelength range (approximately 240 nm) to a photosensitive material such as a photoresist agent for an arbitrary time.

Two types of light sources are installed as standard: a DeepUV lamp that can irradiate strong line spectrum light and a Xe lamp that can irradiate continuous spectrum light.

The sample moves step by step on the motorized stage, and irradiation can be performed while changing the irradiation time.

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Features:

Continuous light with a wavelength width of about 240 nm can be irradiated for an arbitrary time on photosensitive materials such as photoresist materials.

Light source: Xe lamp Deep UV lamp

Irradiation wavelength range: 230 to 800 nm

Irradiation light area: 80 x 5 mm

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Irradiation image:

Holder (2 types):

Software:

Start (Condition): Enter the first number of seconds for the irradiation time (0.01 to 1200)

End…Enter the number of seconds at the end of the irradiation time (0.01 to 1200)

Number of divisions…Enter the number to divide between the start and end (2 to 13)

Division method: select from Linear or Log

Calculate…Close the irradiation condition screen and return to the main menu

Close･･･Closes the irradiation condition screen and returns to the main menu.

Manual: Arbitrarily set the shutter state and stage position.

Start (whole): Starts irradiation under the set conditions.

Specification:

Irradiation wavelength range	Wavelength width that can be irradiated at once Approx. 240 nm
Light irradiation area	Long-distance movement type Height direction: 89 mm (5 x 13 steps, space between irradiation bands: 2 mm)
	Wavelength direction: about 80mm (about 240nm)
irradiation time	0.01 to 1200 sec
Minimum set time	0.01sec
Irradiation stage	1 to 13 steps
Irradiation division direction	select from Linear/log
light source	Deep UV lamp 500W, Xe lamp 500W
Light source switching	Manual switching by mirror
sample holder	For □100mm, □127mm glass plate (replaceable)