MOQ | 1 Unit |
Port | Tokyo |
Packaging | Ask |
Lead Time | Ask |
A spectroscopic device that emits monochromatic light with a wavelength range (approximately 240 nm) to a photosensitive material such as a photoresist agent for an arbitrary time.
Two types of light sources are installed as standard: a DeepUV lamp that can irradiate strong line spectrum light and a Xe lamp that can irradiate continuous spectrum light.
The sample moves step by step on the motorized stage, and irradiation can be performed while changing the irradiation time.
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Irradiation wavelength range | Wavelength width that can be irradiated at once Approx. 240 nm |
Light irradiation area | Long-distance movement type Height direction: 89 mm (5 x 13 steps, space between irradiation bands: 2 mm) |
Wavelength direction: about 80mm (about 240nm) | |
irradiation time | 0.01 to 1200 sec |
Minimum set time | 0.01sec |
Irradiation stage | 1 to 13 steps |
Irradiation division direction | select from Linear/log |
light source | Deep UV lamp 500W, Xe lamp 500W |
Light source switching | Manual switching by mirror |
sample holder | For □100mm, □127mm glass plate (replaceable) |
Body: Approx. W1000 x D650 x H470mm
*Lamp power supply, controller, electrometer - sold separately