Measuring
range available when set to No extra-fine wire measurementor Edge
specification in the basic setup mode.
Environment for accuracy validation: 20°C 1°C temperature, 50%
10% humidity.
The value
of 2 o with a 2mm-diameter gage has been measured for two minutes
with a measurement interval of 0.32 seconds, where is the
standard deviation.
The value
of measurements in the center of the measurement region.
Error due
to the positional shift of the workpiece in the optical axis
direction or scanning direction
Averaging
scans between 1 and 8 times can be made if No extra-fine wire
measurement is specified in the basic setup mode.