Intelligent Mass Flow Controller

Product Details

Mass Flow Meters are a common instrument used in gas flow measurement applications. The Mass Flow Meter (MFM) is an instrument that accurately measures gas flow. Mass Flow Controllers (MFC: Mass Flow Controller), with integrated MFM and control valves, not only have the function of a mass flow meter, but also automatically control the gas flow, i.e. the user can set the flow rate according to his needs, and the MFC automatically keeps the flow rate constant at the set value, which will not deviate from the set value even if there are fluctuations in the system pressure or changes in ambient temperature. The MFC can be used as a flow stabiliser and can be set manually or connected to a computer for automatic control of the gas flow Product features, this product is integrated with a touch screen, you can select the type of gas to be controlled, the size of the pressure control value, flow volume, precision, etc. through the display, easy to operate, real-time display of the current flow information. This product has important applications in the semiconductor and integrated circuit industry, special materials, chemical industry, petroleum industry, medicine, environmental protection and vacuum, and other fields of research and production. Typical applications are electronic process equipment, such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation and coating equipment, optical fibre melting, micro -reaction devices, gas mixing and distribution systems, capillary measurement, gas chromatograph and other analytical instruments