Titanium Silicide (TiSi2) -Sputtering Target

FOB Price 1 - 1 USD / Piece

MOQ	1 Piece
Port	Shanghai
Packaging	Packing: inner in vacuum packing, outer in wooden box.
Lead Time	10 days

Quick Details (View All)

CAS	12039-83-7	Molecular Formula	TiSi2
Purity	99.99%	Size	Dia: 50.8mmx 6.35mm
Color	Black Orthorhombic Crystals	Density	4.02 g/cm3

Product Details

Characteristic:
Titanium disilicide (TiSi2) is an inorganic chemical compound.
Chemical formula:TiSi2
Molar mass:104.038 g/mol
Appearance:black orthorhombic crystals
Density:4.02 g/cm3
Melting point:1,470 °C (2,680 °F; 1,740 K)
Solubility in water:insoluble
Solubility: soluble in HF
Application:
Titanium silicide is used in the semiconductor industry. It is typically grown by means of salicide technology over silicon and polysilicon lines to reduce the sheet resistance of local transistors connections. In the microelectronic industry it is typically used in the C54 phase.
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