Air pump for dosing 30L/min of an air/ozone mixture at 250mbar

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Hi,
I am looking for a pump for dosing an air/ozone mixture.
medium : gas from an ozone generator with 5g/m3 ozone
flow : 30L/min
inlet pressure : -150mbar
outlet pressure : 100mbar
Application description :
Pumping the outlet gas from an ozone generator with 5g/m3 ozone at a flow rate of 30L/min to a system in light over pressure of 100mbar.
The pressure drop over the generator is 150mbar at 30L/min so the pump inlet pressure is -150mbar.
The total pressure difference the pump has to deliver is 250mbar at that point.
I think a membrane pump with PTFE diaphragm maybe can be used for this.
Thank you,
Mark